Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7611585 | Plasma reaction chamber with a built-in magnetic core | — | 2009-11-03 |
| 7578944 | Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same | Young-Min Min, Do-In Bae, Yun-Sik Yang, Wan-Goo Hwang, Jin-Man Kim | 2009-08-25 |
| 7217337 | Plasma process chamber and system | — | 2007-05-15 |
| 7193369 | Method for generating gas plasma | Young-Min Min, Do-In Bae, Yun-Sik Yang, Wan-Goo Hwang, Jin-Man Kim | 2007-03-20 |
| 6815899 | Remote plasma generator | — | 2004-11-09 |
| 6816029 | RF matching unit | Young-Min Min, Sang-Mun Chon, Yun-Sik Yang, Jin-Man Kim | 2004-11-09 |
| 6762393 | Inductively coupled plasma source with conductive layer and process of plasma generation | — | 2004-07-13 |
| 6423278 | Plasma dry scrubber | — | 2002-07-23 |