Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9799543 | Process box, arrangements and methods for processing coated substrates | Dang Cuong Phan, Stefan Jost | 2017-10-24 |
| 9352431 | Device for forming a reduced chamber space, and method for positioning multilayer bodies | Joerg Palm, Stefan Jost, Jessica Hartwich | 2016-05-31 |
| 9236282 | Arrangement, system, and method for processing multilayer bodies | Stefan Jost, Joerg Palm | 2016-01-12 |
| 8187377 | Non-contact etch annealing of strained layers | Igor J. Malik, Sien G. Kang, Harry Kirk, Ariel Flat, Michael I. Current +1 more | 2012-05-29 |