Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7919346 | Micromechanical component and manufacturing method | Arnd Kaelberer | 2011-04-05 |
| 7316161 | Rotation rate sensor | Rainer Willig, Jochen Franz, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez +7 more | 2008-01-08 |
| 7313958 | Rotational rate sensor | Rainer Willig, Jochen Franz, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez +7 more | 2008-01-01 |
| 7270868 | Micromechanical component | Thorsten Pannek, Udo Bischof, Silvia Kronmueller, Ulf Wilhelm | 2007-09-18 |