Issued Patents All Time
Showing 151–154 of 154 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5812361 | Dynamic feedback electrostatic wafer chuck | Phillip Jones, Seyed Jafar Jafarian-Tehrani, Boris Atlas, Ken Tokunaga, Ching-Hwa Chen | 1998-09-22 |
| 5368710 | Method of treating an article with a plasma apparatus in which a uniform electric field is induced by a dielectric window | Ching-Hwa Chen, Duc Tran | 1994-11-29 |
| 5356478 | Plasma cleaning method for removing residues in a plasma treatment chamber | Ching-Hwa Chen, David R. Arnett | 1994-10-18 |
| 5226967 | Plasma apparatus including dielectric window for inducing a uniform electric field in a plasma chamber | Ching-Hwa Chen, Duc Tran | 1993-07-13 |