Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5849641 | Methods and apparatus for etching a conductive layer to improve yield | Jeffrey V. Musser | 1998-12-15 |
| 5356478 | Plasma cleaning method for removing residues in a plasma treatment chamber | Ching-Hwa Chen, David R. Liu | 1994-10-18 |