Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6090717 | High density plasma etching of metallization layer using chlorine and nitrogen | Stephen Powell, Robert Guerra, Timothy Webb | 2000-07-18 |
| 5849641 | Methods and apparatus for etching a conductive layer to improve yield | David R. Arnett | 1998-12-15 |
| 4859304 | Temperature controlled anode for plasma dry etchers for etching semiconductor | David A. Cathey, John C. Freeman, James L. Dale, William J. Crane, Eric Powell | 1989-08-22 |