Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stage

Assignee

• Tsinghua University
• Beijing U-Precision Tech Co.

Inventors

• Yu Zhu (66 patents)
• Ming Zhang (48 patents)
• Anlin Chen (6 patents)
• Rong Cheng (27 patents)
• Kaiming Yang (27 patents)
• Feng Liu (6 patents)
• Yujing Song (1 patents)
• Fan Zhi (3 patents)
• Jinchun Hu (26 patents)
• Dengfeng Xu (29 patents)
• Haihua Mu (14 patents)
• Chuxiong Hu (6 patents)

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