Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Plasma processing apparatus

Plasma processing apparatus

US Patent 9991097 · Granted Jun 5, 2018

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Plasma processing apparatus and ceiling wall2025
Cleaning method and plasma treatment device2024
Plasma processing method and plasma processing apparatus2024
Film forming method and film forming apparatus2024
Film forming method and film forming apparatus2024
Plasma processing apparatus2022
Plasma processing apparatus2022
Electric field sensor, surface wave plasma source, and surface wave plasma proce2022
Plasma probe device and plasma processing apparatus2021
Film deposition method and computer program storage medium2021
Method and apparatus for forming hard mask film and method for manufacturing sem2020
Plasma processing apparatus and gas introduction mechanism2020