Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and system for gas flow mitigation of molecular contamination of optics

Method and system for gas flow mitigation of molecular contamination of optics

US Patent 9874512 · Granted Jan 23, 2018

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Protection of optical materials of optical components from radiation degradation2025
Pre-mounted lock for a door of a low voltage enclosure2025
Method and apparatus for positioning optical isolator assembly with replaceable 2025
System and method for using an artificial intelligence (AI) model to route data2025
Counterflow gas nozzle for contamination mitigation in extreme ultraviolet inspe2024
Material recovery systems for optical components2023
System and method for optical-path coupling of light for in-situ photochemical c2023
Plasmonic photocathode emitters at ultraviolet and visible wavelengths2022
Laser produced plasma light source having a target material coated on a cylindri2022
Droplet generation for a laser produced plasma light source2022
Boron-based capping layers for EUV optics2022
System and method for protecting optics from vacuum ultraviolet light2022