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Home › Structure and method for improved stabilization of cobalt cap and/or cobalt liner in interconnects

Structure and method for improved stabilization of cobalt cap and/or cobalt liner in interconnects

US Patent 9780035 · Granted Oct 3, 2017

Estimated economic value: $4,036,000 ⓘ

Assignee

IBM

Inventors

Benjamin D. Briggs (191 patents)
James J. Kelly (58 patents)
Koichi Motoyama (118 patents)
Roger A. Quon (53 patents)
Michael Rizzolo (206 patents)
Theodorus E. Standaert (312 patents)

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