Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Shower plate sintered integrally with gas release hole member and method for manufacturing the same

Shower plate sintered integrally with gas release hole member and method for manufacturing the same

US Patent 9767994 · Granted Sep 19, 2017

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of forming an electronic structure using reforming gas, system for perfor2025
Method of forming structures using a neutral beam2024
Substrate processing apparatus having electrostatic chuck and substrate processi2024
Method of forming an electronic structure using reforming gas, system for perfor2024
Plasma processing apparatus2023
Capacitive sensor and manufacturing method of capacitive sensor2023
Method of forming structures using a neutral beam2023
Plasma device using coaxial waveguide, and substrate treatment method2023
Capacitance detection area sensor and conductive pattern sensing apparatus havin2023
Welding method of diffusion bonded structure2022
Plasma processing apparatus2022
Substrate processing method and apparatus2022