Planar motor rotor displacement measuring device and its measuring method

Assignee

• Shanghai Micro Electronics Equipment (Group) Co.
• Tsinghua University

Inventors

• Jinchun Hu (26 patents)
• Yu Zhu (66 patents)
• Wensheng Yin (23 patents)
• Longmin Chen (3 patents)
• Kaiming Yang (27 patents)
• Ming Zhang (48 patents)
• Dengfeng Xu (29 patents)
• Haihua Mu (14 patents)
• Chuxiong Hu (6 patents)
• Zhao Liu (9 patents)

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