Coating compositions suitable for use with an overcoated photoresist

Assignee

• Globalfoundries

Inventors

• James F. Cameron (88 patents)
• Jin Wuk Sung (20 patents)
• John P. Amara (20 patents)
• Greogory P. Prokopowicz (2 patents)
• David A. Valeri (8 patents)
• Libor Vyklicky (16 patents)
• Wu-Song Huang (110 patents)
• Wenjie Li (106 patents)
• Pushkara R. Varanasi (82 patents)
• Irene Popova (8 patents)

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