Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Partial etch memorization via flash addition

Partial etch memorization via flash addition

US Patent 9576812 · Granted Feb 21, 2017

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Metal oxide resists for EUV patterning and methods for developing the same2025
Cyclic method for reactive development of photoresists2025
Oblique deposition and etch processes2025
Treatment method2023
Gray-tone lithography for precise control of grating etch depth2023
Method for pitch split patterning using sidewall image transfer2023
Gradient refractive index grating for display leakage reduction2023
Method and system for capping of cores for self-aligned multiple patterning2023
Surface fluorination remediation for aluminium oxide electrostatic chucks2023
Methods to reduce microbridge defects in EUV patterning for microelectronic work2023
Methods for EUV inverse patterning in processing of microelectronic workpieces2023
Methods to reshape spacer profiles in self-aligned multiple patterning2023