Ultra low silicon loss high dose implant strip

Assignee

• Novellus Systems

Inventors

• David Cheung (102 patents)
• Haoquan Fang (12 patents)
• Jack Kuo (10 patents)
• Ilia Kalinovski (9 patents)
• Zhao Li (12 patents)
• Guhua Yao (1 patents)
• Anirban Guha (5 patents)
• Kirk Ostrowski (7 patents)

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