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Home › Overlay metrology method and overlay control method and system

Overlay metrology method and overlay control method and system

US Patent 9563946 · Granted Feb 7, 2017

Estimated economic value: $3,015,000 ⓘ

Assignee

TSMC

Inventors

Yung-Yao Lee (61 patents)
Ying-Ying Wang (24 patents)
Shang-Wern Chang (12 patents)
Heng-Hsin Liu (125 patents)

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