Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Immersion exposure tool

Immersion exposure tool

US Patent 12306542 · Granted May 20, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Cantilever with etch chamber flow design2025
Method for forming layer2025
Semiconductor structure and manufacturing method thereof2025
Semiconductor wafer cooling2025
Method of using wafer stage2025
Semiconductor developer tool and methods of operation2025
Method and system of surface topography measurement for lithography2025
Apparatus for physical vapor deposition and method for forming a layer2025
Method of manufacturing semiconductor structure2025
Resist pump buffer tank and method of resist defect reduction2024
Wafer stage and method of using2024
Method of operating drippage prevention system2024