Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Peroxide-vapor treatment for enhancing photoresist-strip performance and modifying organic films

Peroxide-vapor treatment for enhancing photoresist-strip performance and modifying organic films

US Patent 9514954 · Granted Dec 6, 2016

Estimated economic value: $22,040,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Ion beam etching with sidewall cleaning2025
Systems and methods for metastable activated radical selective strip and etch us2025
Systems and methods for metastable activated radical selective strip and etch us2025
Systems and methods for metastable activated radical selective strip and etch us2025
Ion beam etching with sidewall cleaning2024
Systems and methods for metastable activated radical selective strip and etch us2023
Electron excitation atomic layer etch2023
Predicting etch characteristics in thermal etching and atomic layer etching2022
Ion beam etching utilizing cryogenic wafer temperatures2022
Method and apparatus for processing wafer-shaped articles2021
Metal doped carbon based hard mask removal in semiconductor fabrication2021
Ion injector and lens system for ion beam milling2021