Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Cascade design showerhead for transient uniformity

Cascade design showerhead for transient uniformity

US Patent 9353439 · Granted May 31, 2016

Estimated economic value: $11,278,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Sublimation control using downstream pressure sensing2025
Gas distribution plate2025
Gas distribution plate2025
Heater design solutions for chemical delivery systems2025
Dual channel showerhead assembly2025
Gas mixer2025
Thermal shield for processing chamber2025
Method and system for authentication and encryption2025
Apparatus and method for focusing of explosions2025
Gas distribution plate2024
Method for quantifying advertising impressions2024
Heater assembly with purge gap control and temperature uniformity for batch proc2023