Plasma processing method and plasma processing apparatus

Assignee

• Tokyo Electron Limited

Inventors

• Naoki Matsumoto (217 patents)
• Yugo Tomita (5 patents)
• Naoki Mihara (11 patents)
• Kazuki Takahashi (88 patents)
• Michitaka Aita (11 patents)
• Jun Yoshikawa (113 patents)
• Takahiro Senda (29 patents)
• Yoshiyasu Sato (6 patents)
• Kazuyuki Kato (21 patents)
• Kenji Sudou (3 patents)
• Hitoshi Mizusugi (1 patents)

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