Hitoshi Mizusugi

TLTokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%

Overall (All Time): #2,997,623 of 4,157,543Top 75%

1 Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #	Title	Co-Inventors	Date
9324542	Plasma processing method and plasma processing apparatus	Naoki Matsumoto, Yugo Tomita, Naoki Mihara, Kazuki Takahashi, Michitaka Aita +5 more	2016-04-26