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Home › Ultrathin superlattice of MnO/Mn/MnN and other metal oxide/metal/metal nitride liners and caps for copper low dielectric constant interconnects

Ultrathin superlattice of MnO/Mn/MnN and other metal oxide/metal/metal nitride liners and caps for copper low dielectric constant interconnects

US Patent 9275952 · Granted Mar 1, 2016

Estimated economic value: $3,006,000 ⓘ

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