Plasma uniformity control by gas diffuser hole design

Assignee

• Applied Materials

Inventors

• Soo Young Choi (176 patents)
• John M. White (252 patents)
• Qunhua Wang (21 patents)
• Li Hou (12 patents)
• Ki Woon Kim (7 patents)
• Shinichi Kurita (132 patents)
• Tae Kyung Won (54 patents)
• Suhail Anwar (53 patents)
• Beom Soo Park (68 patents)
• Robin L. Tiner (61 patents)

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