Optimization of conveyor belts used for workpiece processing

Assignee

• Varian Semiconductor Equipment Associates

Inventors

• Robert Brent Vopat (44 patents)
• Malcolm N. Daniel, JR. (10 patents)
• Luke Bonecutter (18 patents)
• Jason M. Schaller (57 patents)
• Charles T. Carlson (78 patents)
• William T. Weaver (74 patents)

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