Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Ion source and a method for in-situ cleaning thereof

Ion source and a method for in-situ cleaning thereof

US Patent 9142379 · Granted Sep 22, 2015

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Lattice based voltage standoff2025
Helical voltage standoff2025
Temperature control for insertable target holder for solid dopant materials2025
Model-based controlled load lock pumping scheme2025
Systems and methods for optimizing full horizontal scanned beam distance2025
Molten liquid transport for tunable vaporization in ion sources2024
Toroidal motion enhanced ion source2024
Single-slot tubular cathode2024
Single-slot tubular cathode2024
System and method for introducing aluminum to an ion source2024
Crucible design for liquid metal in an ion source2023
Variable thickness ion source extraction plate2023