Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of removing damaged epoxy from electrostatic chuck

Method of removing damaged epoxy from electrostatic chuck

US Patent 9105676 · Granted Aug 11, 2015

Estimated economic value: $11,689,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Molded parts with reduced microwave reflections and transmission2025
Methods for removing deposits on the surface of a chamber component2025
Method of cleaning chamber components with metal etch residues2025
Integrated semiconductor part cleaning system2025
Texturizing a surface without bead blasting2025
Method for conditioning semiconductor processing chamber components2024
Conditioning chamber component2024
Wet cleaning of electrostatic chuck2023
Method for conditioning a ceramic coating2022
Method to selectively pattern a surface for plasma resistant coat applications2021
Conditioning chamber component2021
Texturizing a surface without bead blasting2020