Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of optimizing lithography tools utilization

Method of optimizing lithography tools utilization

US Patent 9081306 · Granted Jul 14, 2015

Estimated economic value: $4,173,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and system for manufacturing a semiconductor device2025
Method and system for manufacturing a semiconductor device2025
Semiconductor manufacturing apparatus and method thereof2025
Semiconductor manufacturing apparatus and method thereof2025
Method and apparatus for coating photoresist over a substrate2024
Substrate support apparatus and method2024
Chimeric endocytic receptors and method of use thereof2024
Method and system for manufacturing a semiconductor device2024
Method of fabricating reticle2024
Work lamp2024
Spin dispenser module substrate surface protection system2023
Spin dispenser module substrate surface protection system2023