Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate support apparatus and method

Substrate support apparatus and method

US Patent 12027407 · Granted Jul 2, 2024

Estimated economic value: $16,937,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Dispensing nozzle design and dispensing method thereof2025
Droplet splash control for extreme ultraviolet photolithography2025
Semiconductor tool for copper deposition2025
Method and apparatus for improving critical dimension variation2025
System and method for correcting non-ideal wafer topography2025
System and method for correcting non-ideal wafer topography2025
Method for cleaning electrostatic chuck2025
Method for cleaning electrostatic chuck2025
Semiconductor tool for copper deposition2025
Reduce mask defect impact by contamination decompose2025
Variable pitch fan-out routing for display panels having narrow borders2025
Method for cleaning electrostatic chuck2024