Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Cleaning solution formulations for substrates

Cleaning solution formulations for substrates

US Patent 9058975 · Granted Jun 16, 2015

Estimated economic value: $14,033,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Vacuum-integrated hardmask processes and apparatus2021
Vacuum-integrated hardmask processes and apparatus2020
Vacuum-integrated hardmask processes and apparatus2019
Interlevel conductor pre-fill utilizing selective barrier deposition2019
Methods for wet metal seed deposition for bottom up gapfill of features2018
Metallization of the wafer edge for optimized electroplating performance on resi2018
Method for selectively sealing ultra low-k porous dielectric layer using flowabl2018
Interlevel conductor pre-fill utilizing selective barrier deposition2018
Atomic layer etching for enhanced bottom-up feature fill2017
Method of electroless plating using a solution with at least two borane containi2017
Vacuum-integrated hardmask processes and apparatus2017
Dual damascene fill2017