Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Methods of forming tensile tungsten films and compressive tungsten films

Methods of forming tensile tungsten films and compressive tungsten films

US Patent 9034760 · Granted May 19, 2015

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods for forming films on substrates2025
Low resistivity gapfill for logic devices2025
Backside reactive inhibition gas2025
Low frequency non-separable transform and multiple transform selection deadlock 2025
Tungsten feature fill with nucleation inhibition2025
Apparatus and method for controlling a flow process material to a deposition cha2025
Metal oxide preclean for bottom-up gapfill in MEOL and BEOL2025
Tungsten feature fill with nucleation inhibition2025
Methods of selective oxidation on rapid thermal processing (RTP) chamber with ac2025
Systems and methods for homogenous intermixing of precursors in alloy atomic lay2025
Dual pressure oxidation method for forming an oxide layer in a feature2025
Tungsten feature fill with inhibition control2025