Method for chemical mechanical polishing silicon wafers

Assignee

• Rohm And Haas Electronic Materials Cmp Holdings
• Nitta Haas

Inventors

• Yasuyuki Itai (3 patents)
• Bainian Qian (41 patents)
• Hiroyuki Nakano (174 patents)
• David B. James (70 patents)
• Naoko Kawai (2 patents)
• Katsumasa Kawabata (10 patents)
• Koichi Yoshida (81 patents)
• Kazutaka Miyamoto (6 patents)
• James Murnane (13 patents)
• Fengji Yeh (13 patents)
• Marty W. DeGroot (35 patents)

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