Modulation device and charged particle multi-beamlet lithography system using the same

Assignee

• Mapper Lithography Ip B.V.

Inventors

• Marco Jan-Jaco Wieland (89 patents)
• Teunis Van De Peut (15 patents)
• Alexander Hendrik Vincent Van Veen (31 patents)
• Remco Jager (14 patents)
• Stijn Willem Herman Karel Steenbrink (38 patents)
• Ralph Van Melle (5 patents)
• Henk Derks (17 patents)

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