Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Yttrium and titanium high-k dielectric films

Yttrium and titanium high-k dielectric films

US Patent 8901708 · Granted Dec 2, 2014

Estimated economic value: $263,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Systems, devices, and methods for performing a non-contact electrical measuremen2025
Systems, devices, and methods for aligning a particle beam and performing a non-2025
Plasma showerhead with improved uniformity2025
Dithering or dynamic offsets for improved uniformity2025
PEALD nitride films2024
Dithering or dynamic offsets for improved uniformity2024
Situ clean for bevel and edge ring2024
Systems, devices, and methods for performing a non-contact electrical measuremen2024
Systems, devices, and methods for aligning a particle beam and performing a non-2024
Method of forming silicon nitride films using microwave plasma2024
PEALD titanium nitride with direct microwave plasma2023
Methods for controlling a flow pulse shape2023