Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Situ clean for bevel and edge ring

Situ clean for bevel and edge ring

US Patent 12068153 · Granted Aug 20, 2024

Estimated economic value: $94,413,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Showerhead design to control stray deposition2025
Directional selective junction clean with field polymer protections2025
Adjustable de-chucking voltage2025
Adjustable de-chucking voltage2025
Method for optimizing low-band-low-band carrier-aggregation transmit and receive2025
Flexible display apparatus and method for manufacturing the same2025
Print control device2025
Advertisement display method and electronic device2025
Flexible display apparatus and support assembly2025
Flexible display panel and sliding and rolling display apparatus2025
In-situ semiconductor processing chamber temperature apparatus2024
Stress treatments for cover wafers2024