Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › High work function, manufacturable top electrode

High work function, manufacturable top electrode

US Patent 8847397 · Granted Sep 30, 2014

Estimated economic value: $908,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Plasma showerhead with improved uniformity2025
Dithering or dynamic offsets for improved uniformity2025
Semiconductor memory device2025
PEALD nitride films2024
Dithering or dynamic offsets for improved uniformity2024
Method of forming silicon nitride films using microwave plasma2024
Semiconductor memory device2024
Semiconductor storage device2023
PEALD titanium nitride with direct microwave plasma2023
Methods for controlling a flow pulse shape2023
PEALD nitride films2023
Machine learning based smart process recipe builder to improve azimuthal flow an2023