Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Magnetic bearing, a rotary stage, and a reflective electron beam lithography apparatus

Magnetic bearing, a rotary stage, and a reflective electron beam lithography apparatus

US Patent 8836190 · Granted Sep 16, 2014

Estimated economic value: $609,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate holder, carrier system comprising a substrate holder and lithographic 2025
Controlling access to a secure computing resource2024
Controlling access to a secure computing resource2023
Elastic guiding device, positioning device, blade and lithographic apparatus2022
Positioning system and lithographic apparatus2021
Vibration isolation device, lithographic apparatus and method to tune a vibratio2020
Apparatus for delivering gas and illumination source for generating high harmoni2020
Vibration isolation system and lithographic apparatus2020
Apparatus for delivering gas and illumination source for generating high harmoni2020
Patient interface assembly with improved stabilization2017
Rotary positioning device2016
Support structure, inspection apparatus, lithographic apparatus and methods for 2014