Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Vibration isolation device, lithographic apparatus and method to tune a vibration isolation device

Vibration isolation device, lithographic apparatus and method to tune a vibration isolation device

US Patent 10782620 · Granted Sep 22, 2020

Estimated economic value: $34,133,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Vibration isolator for supporting a payload2025
Vibration isolation system and lithographic apparatus2020
Vibration isolation system and lithographic apparatus2020
Support structure, inspection apparatus, lithographic apparatus and methods for 2014
Magnetic bearing, a rotary stage, and a reflective electron beam lithography app2014
Inspection method and apparatus, lithographic apparatus, lithographic processing2014
Inspection method and apparatus2014
Device for placing components on a carrier2004