Positioning system and lithographic apparatus

Assignee

• Asml Netherlands B.V.
• Asml Holding N.V.

Inventors

• Krijn Frederik Bustraan (8 patents)
• Yang-Shan Huang (21 patents)
• Antonius Franciscus Johannes De Groot (29 patents)
• Minkyu Kim (46 patents)
• Jasper Anne Frido Marikus Simons (3 patents)
• Theo Anjes Maria Ruijl (17 patents)
• Ronald Lamers (2 patents)

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