Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lithographic apparatus having encoder type position sensor system

Lithographic apparatus having encoder type position sensor system

US Patent 8760615 · Granted Jun 24, 2014

Estimated economic value: $4,301,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Vibration isolator for supporting a payload2025
Wavelength tracking system, method to calibrate a wavelength tracking system, li2025
Substrate support, lithographic apparatus, method for manipulating charge distri2025
Imprint apparatus with movable stages2024
Laser focussing module2024
Metrology apparatus2024
Lithographic apparatus2024
Interferometer system, method of determining a mode hop of a laser source of an 2023
Lithographic apparatus2023
Ultrasound probe positioning system and method of hands-free controlling the pre2023
Interferometric stage positioning apparatus2022
Lithographic apparatus and device manufacturing method involving a heater2022