Smooth silicon-containing films

Assignee

• Novellus Systems

Inventors

• Keith Fox (20 patents)
• Dong Niu (15 patents)
• Joe Womack (4 patents)
• Mandyam Sriram (58 patents)
• George Andrew Antonelli (40 patents)
• Bart J. van Schravendijk (126 patents)
• Jennifer O'Loughlin (15 patents)

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