Method and device for inspecting for defects

Assignee

• Hitachi High-Technologies

Inventors

• Toshiyuki Nakao (41 patents)
• Junguo Xu (31 patents)
• Yuki Shimizu (61 patents)
• Toshihiko Nakata (106 patents)
• Toshifumi Honda (113 patents)
• Yukihiro Shibata (93 patents)
• Yuta Urano (80 patents)

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