Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Negative resist pattern forming method, developer and negative chemical-amplification resist composition used therefor, and resist pattern

Negative resist pattern forming method, developer and negative chemical-amplification resist composition used therefor, and resist pattern

US Patent 8637222 · Granted Jan 28, 2014

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Canister2025
Treatment liquid and pattern forming method2025
Treatment liquid and pattern forming method2025
Light-emitting device, lighting device, and optical member2024
Actinic ray-sensitive or radiation-sensitive resin composition, pattern forming 2023
Actinic ray-sensitive or radiation-sensitive composition, method for producing a2022
Onboard system, ground system, and information transmission system2021
Actinic ray-sensitive or radiation-sensitive composition, method for purifying a2021
Light-emitting device, lighting device, and optical member2021
Treatment liquid and pattern forming method2021
Treatment liquid and pattern forming method2021
Treatment liquid and pattern forming method2021