Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate supports for semiconductor applications

Substrate supports for semiconductor applications

US Patent 8619406 · Granted Dec 31, 2013

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Electrostatic chuck for high bias radio frequency (RF) power application in a pl2025
Advanced temperature control for wafer carrier in plasma processing chamber2025
Substrate support with multiple embedded electrodes2025
High power electrostatic chuck design with radio frequency coupling2024
Sheath and temperature control of process kit2024
Advanced temperature control for wafer carrier in plasma processing chamber2023
Sheath and temperature control of a process kit in a substrate processing chambe2023
High power electrostatic chuck design with radio frequency coupling2022
Workpiece carrier for high power with enhanced edge sealing2021
Semiconductor substrate supports with embedded RF shield2021
Method for contents playback with continuity and electronic device therefor2021
Substrate support with multiple embedded electrodes2021