Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › High power electrostatic chuck design with radio frequency coupling

High power electrostatic chuck design with radio frequency coupling

US Patent 11532497 · Granted Dec 20, 2022

Estimated economic value: $39,023,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and apparatus for digital control of ion energy distribution in a plasma2025
Increasing the gas efficiency for an electrostatic chuck2025
Pulsed plasma (DC/RF) deposition of high quality C films for patterning2025
Extreme uniformity heated substrate support assembly2025
Display panel and display device2025
Display panel, manufacturing method thereof and display device2025
Method for forming integrated circuit structures2025
Methods and apparatus for processing a substrate2025
Semiconductor substrate support with internal channels2025
Radio-frequency (RF) matching network for fast impedance tuning2025
Wafer to baseplate arc prevention using textured dielectric2025
Inductively coupled plasma source with radial coil network2025