Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Measuring method, measuring apparatus, lithographic apparatus and device manufacturing method

Measuring method, measuring apparatus, lithographic apparatus and device manufacturing method

US Patent 8593646 · Granted Nov 26, 2013

Estimated economic value: $21,848,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Metrology method for measuring an etched trench and associated metrology apparat2025
Method and apparatus to determine a patterning process parameter2025
Metrology method, target and substrate2025
Metrology apparatus based on high harmonic generation and associated method2025
Method of determining a characteristic of a structure, and metrology apparatus2025
Metrology systems, coherence scrambler illumination sources and methods thereof2025
Substrate holder, lithographic apparatus, device manufacturing method, and metho2025
Metrology system and method for determining a characteristic of one or more stru2025
Substrate holder and method of manufacturing a substrate holder2025
Illumination apparatus and associated metrology and lithographic apparatuses2025
Metrology tool with position control of projection system2025
Inspection method and apparatus, lithographic apparatus, lithographic processing2025