Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Platen clamping surface monitoring

Platen clamping surface monitoring

US Patent 8592786 · Granted Nov 26, 2013

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Active cooling of quartz enveloped heaters in vacuum2025
Forming a doped hardmask2025
Efficient wind energy convertor without gearbox or multi-pole generator2024
System apparatus and method for enhancing electrical clamping of substrates usin2024
Snow and ice removal device2023
System apparatus and method for enhancing electrical clamping of substrates usin2022
System apparatus and method for enhancing electrical clamping of substrates usin2022
Carbon nanotube electrostatic chuck2021
Low emission implantation mask and substrate assembly2020
System and method for reduced workpiece adhesion due to electrostatic charge dur2020
System and method for reduced workpiece adhesion due to electrostatic charge dur2020
Low emission cladding and ion implanter2020