Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage

Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage

US Patent 8582080 · Granted Nov 12, 2013

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Curved reticle by mechanical and phase bending along orthogonal axes2025
Analyzer system for aligning and focusing an energy beam in a three-dimensional 2025
Metrology for additive manufacturing2025
Vibration reduction system for precision robotics applications2024
Balanced active stabilizers2024
Vibration isolation systems with reaction masses and actuators2024
Measurement of a change in a geometrical characteristic and/or position of a wor2024
Fluid monitoring system2024
Slurry analysis system using flow restriction2023
Fluid synthesis system2022
Fluid synthesis system2022
Illumination system with curved 1d-patterned mask for use in EUV-exposure tool2022