Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for manipulating a substrate

Method and apparatus for manipulating a substrate

US Patent 8550520 · Granted Oct 8, 2013

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Shield ring mounting using compliant hardware2025
Substrate halo arrangement for improved process uniformity2024
Active temperature control for RF window in immersed antenna source2024
Hydrophobic shafts for use in process chambers2021
Ion source chamber with embedded heater2021
Apparatus and techniques to treat substrates using directional plasma and point 2020
Hydrophobic shafts for use in process chambers2020
Low particle capacitively coupled components for workpiece processing2019
Radio frequency extraction system for charge neutralized ion beam2019
Apparatus and techniques to treat substrates using directional plasma and point 2018
Gas injection system for ion beam device2018
Apparatus and techniques to treat substrates using directional plasma and reacti2018