Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lithographic apparatus having a substrate support with open cell plastic foam parts

Lithographic apparatus having a substrate support with open cell plastic foam parts

US Patent 8400617 · Granted Mar 19, 2013

Estimated economic value: $15,642,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Generating an alignment signal based on local alignment mark distortions2025
Asymmetry extended grid model for wafer alignment2025
Wavelength tracking system, method to calibrate a wavelength tracking system, li2025
Imprint apparatus with movable stages2024
Metrology method and associated metrology and lithographic apparatuses2024
Wafer alignment using form birefringence of targets or product2024
Metrology apparatus2024
Lithographic apparatus2024
Apparatus for and method of sensing alignment marks2024
Interferometer system, method of determining a mode hop of a laser source of an 2023
Lithographic apparatus2023
Adaptive alignment2022