Method for heat treating a silicon wafer

Assignee

• Covalent Materials

Inventors

• Takeshi Senda (14 patents)
• Hiromichi Isogai (9 patents)
• Eiji Toyoda (46 patents)
• Kumiko Murayama (4 patents)
• Koji Araki (21 patents)
• Tatsuhiko Aoki (11 patents)
• Haruo Sudo (10 patents)
• Koji Izunome (18 patents)
• Susumu Maeda (49 patents)
• Kazuhiko Kashima (11 patents)

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